Excimer laser system

Spectroscopy, lithography

Excimer laser system EX10A/500

Available waveleghts: 157 nm, 193 nm, 248 nm

Beam characteristics:

Wavelenght: 157 nm

• energy: 2.5 mJ
• power: 0.8 W

Wavelenght: 193 nm

• energy: 18.5 mJ
• power: 14 W

Wavelenght: 248 nm

• energy: 26 mJ
• power: 11 W